半导体物理学半导体 (40).pdf
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1、Two Terminal MOS Structure0506Two Terminal MOS Structure The heart of the MOSFET is the MOS capacitor.tox:the thickness of the oxide ox:the permittivity of the oxide.Energy-Band DiagramsA parallel-plate capacitor showing the electric field and conductor charges.The capacitance per unit area for this
2、 geometry is:permittivity of the insulator;d:the distance between the two plates.The magnitude of the charge per unit area on either plate is where the prime indicates charge or capacitance per unit area.The magnitude of the electric field is(11.1)(11.2)(11.3)Energy-Band Diagrams Negative gate bias.
3、The majority carrier holes wouldexperience a force toward theoxide semiconductor interface.TheMOScapacitorwithanaccumulation layer of holes.A MOS capacitor with a negative gate bias showingthe electric field and charge flow.An accumulation layer of holes atthe oxidesemiconductor junctioncorresponds
4、to the positive chargeon the bottom“plate”.Energy-Band Diagrams:P type substrate When positive gate bias,holes are pushed away from the interface,a negative spacecharge region is created because of the fixed ionized acceptor atoms.The negative chargein the induced depletion region corresponds to the
5、 negative charge on the bottom“plate”.The equilibrium distribution of charge in the MOS capacitorThe MOS capacitor with a moderate positive gate bias,showing(a)the electric field and charge flow and(b)the induced space charge region.Energy-Band DiagramsAccumulation layer of holes The valence-band ed
6、ge is closer to the Fermi level at the oxidesemiconductor interface than in the bulk material The Fermi level is a constant in the semiconductor since the MOS system is in thermal equilibrium and there is no current through the oxide.Space charge region The conduction band and intrinsic Fermi levels
7、 move closer to the Fermi level.The induced space charge width is xd.The conduction band and intrinsic Fermi levels move closer to the Fermi level.The induced space charge width is xd.Inversion layer of electronsEInversion layer of electrons The conduction band at the surface is now close to the Fer
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