四探针一体机使用说明书.pdf
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1、相对湿度:50%70%SZT-2A 四探针测试仪 使用说明书 一概述 SZT-2A型数字式四探针测试仪是运用四线法测量原理的多用途 综合测量装置,配上专用的四探针测试架,即可以测量片状,块状或 柱状半导体材料的径向和轴向电阻率,测量扩散层的薄层电阻(亦称 方块电阻)。四探针测试架有电动,手动,手持三种可以选配,另外 还配有四个夹子的四线输入插头用来作为测量线状或片状电阻的 中,低阻阻值。仪器由主机,测试架等部份组成,测试结果由液晶显示器显示,同时,液晶显示器还显示测量类型(电阻率,方块电阻和电阻)以及 探头修正系数,主机由开关电源,DC/DC换器,高灵敏度电压测量部份,高稳 定度恒流源,和微电
2、脑控制系统组成。由於采用大规模集成电路,所 以仪器可靠性高,测量稳定性好。测试探头采用宝石导向轴套和高硬度钢针,定位准确,游移率小,使用寿命长。仪器适用於半导体材料厂,半导体器件厂,科研单位,高等院校对半 导体材料电阻性能的测试。本仪器工作条件为:温 度:23C 士 3C 工作室内应无强磁场干扰,不与高频设备共用电源。二,技术参数 1,测量范围 电阻率:10?105?-cm 方块电阻10?-10 5?/口 电阻 10-?-10 5?2,可测半导体材尺寸 直 径:15-100mm 长(或高)度:10?(4)最大分辨率:10 K V(5)点阵液晶显示,过载显示。5,恒流源:(1)电流输出:共分 1
3、0 v A,100uA,1mA,10mA,100m/E挡 可通过按键选择,各挡均为定值不可调节,电阻率探 头修正系和扩散层方块电阻修正系数均由机内 CPU运 算后,直接显示修正后的结果。(2)误 差:士 0.5%士2 字。6,四探针测试头;(1)探针间距:1mm(2)探针机械游移率:士 1.0%(3)探针材料:碳化鸨,0.5mm 0-2Kg 可调,最大压力约2Kg 7,电 源:交流 220V 士 10%功耗 35W 本仪器可以选配电动测试架,手动测试架,手持探险头或四夹子电阻 测量输入线。1,电动测试架;电动测试架是用步进电机驱动测试头升降,只要将被测工件放在测试 平台中心位置,按一次启动按钮
4、,测试头白动下降,直到针头和被测 工件接触,探头将白动以慢速下降一段距离压紧探针使针与工件接触 良好并等待测量,稍候测量结束,探头上行并恢复到原来位置。所以 电动测试架的操作简便,探针对被测工件所施压力恒定,测量结果稳 定,建议优先选配。2,手动测试架 以其结构简单不用电源见长,只要操作熟练,测量精度和稳定性也很 好。3,手持式四探针测试头,使用灵活可以对任意形状的半导体材料进 行测试,而且脱离了测试架尺寸的限止,可以对大尺寸单晶硅柱的任 意部位进行单点或多点测试,但由於探针对被测材料的压力是由手感 控制的,因此,测量时必须将探头持稳压紧,保证探针和被测工件接 触良好。4带夹四线测试头,是必配
5、件,可以用四线法测量低阻值电阻。三,工作原理;1,测试原理;直流四探针法测试原理简介如下;(1)电阻率测量;当1,2,3,4四根金属针排成一直线时体材料上时,在 1,4两 根探针间通过电流I,则在2,3探针间产生电位差V,材料电阻率p=CV(?-cm)(3-1)式中C为探针修正系数,由探针的间距决定。当试样电阻率分布均匀,试样尺寸满足半无穷大条件时 _ 2 _ C=1 1 1 1(cm)S 1 S 2 S 1 S 2 S 2 S 3(3-2)式中:S,S2&分别为探针对1与2,2与3,3与4之间的距 离,探头系数由制造厂对探针间距进行测定后确定,并提供给用 户。每个探头都有白已的系数。C Q
6、6.28 士 0.05,单位为 cm(a)块状或棒状样品体电阻率测量:由於块状或棒状样品外形尺寸远大於探针间距,符合半无穷大的(3-5)边界条件,电阻率值可直接由(3-1)式求出。(b)薄片电阻率测量:薄片样品因为其厚度与探针间距相近,不符合半远穷大边界条件,测量时要附加样品的厚度,形状和测量位置的修正系数。其电阻率值可由下面公式得出 p CV G(W)D(d)-p 0 G(W)D(d)(3-3)式中p 0 为块状体电阻率测量值 G(W)S 为样品厚度修正系数,可由附录1A或附录1B查得 w样品厚度(V m;s探针间距(mm D:(d)为样品形状与测量位置的修正函数可由附录 S 2查得。当园形
7、硅片的厚度满足-800 10 uA 附录 1A 样品厚度修正系数 G(*)S 样品厚度较薄:=0.00ii 见表 5 W:样品厚度(m):S:探针间距(mm)W/S W 0 1 2 3 4 5 6 7 8 9 0.00 0.000.001.001.002.003.004.004.005.006.006 0.01 10.007.008.009.009.010.011.012.012.013.014 0.02 20.014.015.016.017.017.018.019.019.020.021 0.03 30.022.022.023.024.025.025.026.027.027.028 0.04
8、 40.029.030.030.031.032.032.033.034.035.035 0.05 50.036.037.038.038.039.040.040.041.042.043 0.06 60.043.044.045.045.046.047.048.048.049.050 0.07 70.051.051.052.053.053.054.055.056.056.057 0.08 80.058.058.059.060.061.061.062.063.063.064 0.09 90.065.066.066.067.068.069.069.070.071.071 0.10 100.072.073
9、.074.074.075.076.077.077.078.079 0.11 110.079.080.081.082.082.083.084.084.085.086 0.12 120.087.087.088.089.089.090.091.092.092.093 0.13 130.094.095.095.096.097.097.098.099.100.100 0.14 140.101.102.102.103.104.105.105.106.107.107 0.15 150.108.109.110.110.111.112.113.113.114.115 0.16 160.115.116.117.1
10、18.118.119.120.120.121.122 0.17 170.123.123.124.125.126.126.127.128.128.129 0.18 180.130.131.131.132.133.133.134.135.136.136 0.19 190.137.138.139.139.140.141.141.142.143.144 0.20 200.144.145.145.146.147.148.149.149.150.151 0.21 210.151.152.153.154.154.155.156.157.157.158 0.22 220.159.159.160.161.162
11、.162.163.164.164.165 0.23 230.166.167.167.168.169.170.170.171.172.172 W/S W 0 1 2 3 4 5 6 7 8 9 0.24 240.173.174.175.175.176.177.177.178.197.180 0.25 250.180.181.182.183.183.184.185.185.186.187 0.26 260.188.188.189.190.190.191.192.193.193.194 0.27 270.195.195.19.197.198.199.199.200.201.201 0.28 280
12、3202.203.203.204.205.205.206.207.208.208 0.29 290.209.210.211.211.212.213.214.214.215.216 0.30 300.216.217.218.219.219.220.221.221.222.223 0.31 310.224.224.225.226.227.227.228.229.229.230 0.32 320.231.232.232.233.234.234.235.236.237.237 0.33 330.238.239.239.240.241.242.242.243.244.245 0.34 340.245.2
13、46.247.247.248.249.250.250.251.252 0.35 350.252.253.254.255.255.256.257.257.258.259 0.36 360.260.260.261.262.263.263.264.265.265.266 0.37 370.267.268.268.269.270.270.271.272.273.273 0.38 380.274.275.275.276.277.278.278.279.280.281 0.39 390.281.282.283.283.284.285.286.286.287.289 0.40 400.288.289.290
14、.291.291.292.293.293.294.295 0.41 410.296.296.297.298.298.299.300.301.301.302 0.42 420.303.303.304.305.306.306.307.308.308.309 0.43 430.310.311.311.312.313.314.314.315.316.316 0.44 440.317.318.319.319.320.321.321.323.323.324 0.45 450.324.325.326.326.327.328.329.329.330.331 0.46 460.331.332.333.333.3
15、34.335.336.336.337.338 0.47 470.338.339.340.341.341.342.343.343.344.345 0.48 480.346.346.347.348.348.349.350.351.351.352 0.49 490.353.353.354.355.355.356.357.358.358.359 0.50 500.360.360.361.362.363.363.364.365.365 3.68 W/S W 0 1 2 3 4 5 6 7 8 9 0.51 510.367.368.368.369.370.370.371 372 372.373 0.52
16、520.374.375.375.376.377.377.378.379.379.380 0.53 530.381.382.382.383.384.384.385.386.386.387 0.54 540.388.389.389.390.391.391.392.393.393.394 0.55 550.395.396.396.397.398.398.399.400.400.401 056 560.402.402.403.404.405.405.406.407.407.408 0.57 570.409.409.410.411.411.412.413.414.414.415 0.58 580.416
17、.416.417.418.418.419.420.420.421.422 0.59 590.422.423.424.425.425.426.427.427.428.429 0.60 600.429.430.431.431.432.433.433.434.435.435 0.61 610.436.437.437.438.439.439.440.441.442.442 0.62 620.443.444.444.445.446.446.447 448.448.449 0.63 630.450.450.451.452.452.453.454 454.455.456 0.64 640.456.457.4
18、58.458.459.460.460 461.462.462 0.65 650.463.464.464.465.466.466.467 468.468.469 0.66 660.470.470.471.472.472.473.474.474.475.476 0.67 670.476.477.477.478.479.479.480.481.481.482 0.68 680.483.483.484.485.485.486.487.488.488.489 0.69 690.489.490.491.491.492.492.493.494.494.495 0.70 700.496.496.497.498
19、.498.499.500.500.501.501 0.71 710.502.503.503.504.505.505.506.507.507.508 0.72 720.508.509.510.510.511.512.512.513.514.514 0.73 730.515.516.516.517.517.518.519.519.520.520 0.74 740.521.522.522.523.524 524.525.525.526.527 0.75 750.527.528.529.529.530.530.531.532.532.533 0.76 760.533.534.535.535.536.5
20、37.537.538.538.539 0.77 770.540.540.541.541.542.543.543.544.544.545 W/S W 0 1 2 3 4 5 6 7 8 9 0.78 780.546.546.547.547.548.549.549.550.550.551 0.79 790.552.552.553.553.554.555.555.556.556.557 0.80 800.558.558.559.559.560.561.561.562.562.563 0.81 810.564.564.565.565.565.567.567.568.568.569 0.82 820.5
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